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 | 半导体设备ETF国泰(159516)基金投资组合(持股) 年份： | | 截止日期 | 股票代码 | 股票名称 | 数量(万股) | 持有市值(万元) | 占基金资产净值比例(%) | | 2026-03-31 | 688012 | 中微公司 | 936.51 | 286928.36 | 59.99% | | 2026-03-31 | 002371 | 北方华创 | 558.68 | 249729.69 | 52.21% | | 2026-03-31 | 688072 | 拓荆科技 | 384.46 | 142248.79 | 29.74% | | 2026-03-31 | 300604 | 长川科技 | 1011.80 | 122478.90 | 25.61% | | 2026-03-31 | 688120 | 华海清科 | 564.24 | 98177.73 | 20.53% | | 2026-03-31 | 688126 | 沪硅产业 | 4368.95 | 73835.19 | 15.44% | | 2026-03-31 | 688361 | 中科飞测 | 478.90 | 72816.36 | 15.22% | | 2026-03-31 | 300346 | 南大光电 | 1571.09 | 70918.83 | 14.83% | | 2026-03-31 | 688019 | 安集科技 | 268.85 | 67394.46 | 14.09% | | 2026-03-31 | 300666 | 江丰电子 | 483.69 | 67338.93 | 14.08% | | 2026-03-31 | 688037 | 芯源微 | 367.66 | 61605.32 | 12.88% | | 2026-03-31 | 688200 | 华峰测控 | 216.28 | 56837.44 | 11.88% | | 2026-03-31 | 002409 | 雅克科技 | 650.28 | 51202.89 | 10.71% | | 2026-03-31 | 688234 | 天岳先进 | 489.73 | 40108.74 | 8.39% | | 2026-03-31 | 605358 | 立昂微 | 1223.92 | 39863.12 | 8.33% | | 2026-03-31 | 301611 | 珂玛科技 | 397.03 | 38476.61 | 8.04% | | 2026-03-31 | 300236 | 上海新阳 | 499.03 | 36658.85 | 7.66% | | 2026-03-31 | 300655 | 晶瑞电材 | 2438.16 | 34524.36 | 7.22% | | 2026-03-31 | 688409 | 富创精密 | 348.95 | 31440.68 | 6.57% | | 2026-03-31 | 688082 | 盛美上海 | 218.96 | 31007.00 | 6.48% | | 2026-03-31 | 600206 | 有研新材 | 1350.50 | 27658.24 | 5.78% | | 2026-03-31 | 688652 | 京仪装备 | 229.74 | 22957.57 | 4.80% | | 2026-03-31 | 603690 | 至纯科技 | 698.28 | 16842.57 | 3.52% | | 2026-03-31 | 688233 | 神工股份 | 233.01 | 15693.47 | 3.28% | | 2026-03-31 | 688146 | 中船特气 | 362.18 | 15414.37 | 3.22% | | 2026-03-31 | 301095 | 广立微 | 228.08 | 14954.92 | 3.13% | | 2026-03-31 | 002119 | 康强电子 | 597.98 | 11983.51 | 2.51% | | 2026-03-31 | 688549 | 中巨芯-U | 1346.74 | 11528.06 | 2.41% | | 2026-03-31 | 688432 | 有研硅 | 853.30 | 11459.81 | 2.40% | | 2026-03-31 | 603078 | 江化微 | 527.51 | 11441.76 | 2.39% | | 2026-03-31 | 688535 | 华海诚科 | 109.23 | 11328.72 | 2.37% | | 2026-03-31 | 688720 | 艾森股份 | 140.85 | 9448.33 | 1.98% | | 2026-03-31 | 301369 | 联动科技 | 64.11 | 8600.26 | 1.80% | | 2026-03-31 | 688584 | 上海合晶 | 454.61 | 8560.34 | 1.79% | | 2026-03-31 | 600520 | 三佳科技 | 289.04 | 6821.34 | 1.43% | | 2026-03-31 | 301629 | 矽电股份 | 28.47 | 6790.10 | 1.42% | | 2026-03-31 | 003026 | 中晶科技 | 176.25 | 6274.57 | 1.31% | | 2026-03-31 | 688478 | 晶升股份 | 157.71 | 4515.13 | 0.94% | | 2026-03-31 | 688721 | 龙图光罩 | 90.99 | 3511.20 | 0.73% | | 2026-03-31 | 688802 | 沐曦股份-U | 0.40 | 240.44 | 0.05% | | 2026-03-31 | 688765 | 禾元生物-U | 1.65 | 105.87 | 0.02% | | 2026-03-31 | 688783 | 西安奕材-U | 4.44 | 93.71 | 0.02% | | 2026-03-31 | 688781 | 视涯科技-UW | 0.63 | 22.62 | 0.00% | | 2026-03-31 | 001280 | 中国铀业 | 0.23 | 18.38 | 0.00% | |
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